Ultra-Precise MEMS Based Bio-Sensors ; Belgium

peer reviewed ; This chapter evaluated the state-of-the art MEMS sensors used for bio sensing applications. A new class of resonant micro sensor is studied. A sensor structure based on the array of weakly coupled resonators is presented. It is shown that due to the weak coupling employed between the resonators in an array manifest ultra-high sensitivity of the output to the added analytes/biomolecules. Due to the highly-precise output of such bio-sensors, minimum detectable mass in the range of sub-actogram is also possible using such MEMS sensors. Analytical modeling of such micro biosensors... Mehr ...